MEMS

A survey of current international research on MEMS is presented.

本文对国外微电子机械系统(MEMS) 的研究现况作了评述.

Studying on dynamic characteristic of MEMS micro-device depends on relevant testing system.

MEMS微器件动态特性的研究需要相应的测试系统.

It is useful for the design and researchment of MEMS devices.

这对MEMS器件的设计与研究具有重要意义.

Then, communication devices based on MEMS technology their applications are reviewed.

重点综述了基于MEMS技术的通信器件及其应用.

Polyimide has become a main material for sacrificial layer in MEMS switch.

目前,聚酰亚胺已成为MEMS开关中一种主要的牺牲层材料.

MEMS material database is a necessary tool for MEMS design.

MEMS材料数据库已经成为MEMS设计领域中必不可少的设计工具.

The automatic optimization algorithms of structural parameters of MEMS devices are studied.

研究了MEMS器件结构参数的自动优化算法及其实现技术.

A RF MEMS switch is designed by computer aided design ( CAD ) method.

应用计算机辅助设计 ( CAD ) 方法模拟设计一种射频微机械(RF-MEMS)开关.

The compensating method for MEMS gyroscope random drift error is discussed.

从工程实用的角度出发,探讨了MEMS陀螺仪随机漂移误差的有效补偿方法.

A MEMS sensor research platform based on micro-converter AD μ C 832 is presented.

提出一种基于微转换器(Micro-Converter)的MEMS传感器组合研究平台.

Piezoelectric actuator is one of the most development prospects in MEMS actuators.

压电驱动是微机械系统(MEMS)微执行器最有发展前途的驱动方式之一.

A micro direct methanol fuel cell ( μ DMFC ) using MEMS technology is reported.

报道了一种利用MEMS技术制作的微型直接甲醇燃料电池.

The widely use of MEMS prompted the extensive research of Power MEMS.

随着微机电系统(MEMS) 的快速发展,为MEMS提供 电能的微小型功率器件(PowerMEMS)逐步得到了广泛的研制.

The development of Power MEMS is associated with MEMS closely.

PowerMEMS (功率微机电系统)与MEMS( 微机电系统)发展密切相关.

Design and phase noise analysis of a MEMS varactor is presented.

给出了一种MEMS压控电容的设计和相位噪声分析结果.