TMAH

The Preparation and Purification of TMAH

四甲基氢氧化铵的制备与提纯综述

The Research and Analysis of the Roughness and Etching Rate in Forming Squre Silicon Cup with TMAH Solution

采用TMAH腐蚀液形成正方形硅杯的粗糙度与腐蚀速率的研究与分析

In addition, the problem of ester exchange of rosin esters as the function of TMAH and the condition for their determination were proposed.

本文还提出了有关中性松香施胶剂中松香酯成分由于TMAH作用而产生的酯交换问题及其解决办法。

Research in Manufacturing Silicon Microstructure with TMAH Solution

TMAH腐蚀液制作硅微结构的研究

Furthermore, the challenge and chance in the study field of TMAH is described, along with our new progresses on the preparation of TMAH.

对目前国内外市场需求进行了综合分析，指出了目前该领域遇到的挑战和机遇。介绍了作者在TMAH合成和提纯方面取得的进展。

Preparation of tetramethyl ammonium hydroxide ( I) application of TMAH solution in MEMS

四甲基氢氧化铵（TMAH）的制备（Ⅰ）四甲基氢氧化铵在MEMS中的应用

The anti-etching characterization of the films is carried out in KOH solutions and TMAH solutions at different temperatures.

本文比较了在不同温度条件下ABS胶膜在KOH和TMAH溶液中的抗腐蚀特性。