barc

Finally, a favorable BARC ( bottom-anti-reflected-coating) etch profile to reduce fencing defect is achieved through plasma parameter optimization based on model results.

模型和实验的结果表明：通过对等离子体刻蚀参数的优化可以产生一个能减少底部防反光层的围墙式缺陷的刻蚀剖面。

Its use doesn't come as a surprise anymore, even in Miguel Barc è lo's, Thomas Sch ü tte's, Richard Deacon's or Giuseppe Penone's pieces, despite their exceptional quality.

使用它没什么特别的，甚至米格尔-巴塞罗，托马斯-舒特，理查德-迪肯和朱塞佩-庞安的作品也一样，尽管他们作品非凡。

BARC Process Used for Sub-micrometer Photolithography

BARC工艺在亚微米光刻中的应用

Beltsville Agricultural Research Center, BARC

贝尔茨维尔农业研究中心