In this paper, the influence of chemical deposition Cobalt film alloy subjoining Rare Earth film were investigated to improve deposition technology, structure and properties of Cobalt soft magnetic film alloy.

  • 为改善化学沉积钴基合金的工艺、组织结构和性能,本文进行了稀土元素介入化学沉积钴基软磁薄膜的研究。

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