The properties and fabrications of some major materials for FBAR such as AlN, ZnO, PZT are introduced systematically, and the structures, devices design and applications of BAW filters are discussed as well.

  • 系统介绍了用于薄膜体声波谐振器的几种主要材料(AlN、ZnO、PZT)的具体特点、制备工艺及薄膜体声波谐振器与滤波器的结构、设计及其应用。

  • 互联网摘选 2025-01-20 12:49:44

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