In this paper, large-diameter SiC single crystal was cut by using diamond wire saw. Mechanics and cutting parameters of diamond wire saw are investigated and experimental results are presented.

  • 采用金刚石线切割大直径的SiC单晶,研究了金刚石线锯的切割机理和切割参数,给出切割SiC单晶的实验结果。

  • 互联网摘选 2025-01-20 13:06:11

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