Results show that the grain size of polycrystalline silicon thin films increased to several centimeters long and millimeters width after ZMR.

  • 研究结果表明:ZMR对籽晶层的区融、结晶效果比较理想,晶粒尺寸增大到厘米级长、毫米级宽;

  • 互联网摘选 2025-01-20 17:32:37

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