Total liquid encapsulated vertical gradient freeze ( VGF) method has been used to grow undoped semi-insulating ( SI) GaAs crystals. The impurities such as silicon and carbon have been well controlled in the growth process.

  • 研究了非掺GaAs半绝缘单晶的液封垂直梯度凝固法(VGF)生长技术,解决了Si沾污和C浓度的控制问题,得到了直径2英寸非掺半绝缘低位错单晶。

  • 互联网摘选 2025-01-20 17:35:02

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