This method, based on the theoretical and numerical analysis by the RCW method, adopts the spectral distributing of the zero order diffraction efficiency to judge the gratings profile.

  • 在基于RCW方法数值拟合与计算的理论研究及分析的基础上,采用根据0级光谱衍射效率分布的办法来检测光栅掩模的槽形;

  • 互联网摘选 2025-01-20 17:37:55

    • 相关例句
    精确
    • 模糊
    • 词首
    • 词尾
    • 词义
    • 例句