The periodicity, thickness of the individual layers, interface roughness and its interfacial microstructures of the typical samples were systematically studied with low-angle X-ray diffraction ( LXD) technique.

  • 利用小角度X射线衍射技术(LXD),详细研究了其中典型的多层膜的调制周期性,各子层的厚度及界面平整度等界面微观结构。

  • 互联网摘选 2025-01-20 17:42:28

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