The Study of the Influence of Manufacturing Error and Trench Structure to Static Rigidity for LMG Design and fabrication of a novel resonator for resonant accelerometer

  • LMG制造误差和沟槽结构对静刚度影响的研究谐振式微加速度计驱动和检测结构设计及制作

  • 互联网摘选 2025-01-20 17:43:47

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