In this paper, research and development were carried out on manufacturing a unit chip structure, which is called integration injection logic ( hereinafter referred to as IIL) using a special process.

  • 本文以实际生产制造过程中,某芯片采用的一种特殊工艺单元结构集成注入逻辑为研究对象,对该单元器件的功能以及如何实现并优化大规模加工工艺进行探究。

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