An electrothermal micro gripper that generates rectilinear displacements and forces by V-shaped beamthermal stress was presented.

  • 介绍了一种新型多晶硅电热微夹钳,该夹钳在V形电热微驱动器的作用下,能够产生近似线性的位移和产生较大的夹持力.

  • 互联网摘选 2025-01-18 15:14:23

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