The phase and continuity of PtSi film formed by sputter deposited Pt film on Si ( 100) and annealed at different condition are studied by XRD, XPS, and TEM.

  • 用XRD、XPS、TEM分析手段研究了在PSi(100)上溅射的Pt膜,经不同工艺形成PtSi薄膜的物相及连续性。

  • 互联网摘选 2025-01-19 23:05:53

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