The effection of dominating processing on deposition rate, adhesion, and residual stress has been revealed.

  • 揭示了主要工艺参数对SiO2和TiO2薄膜的沉积速率、附着力、内应力和透过率的影响规律。

  • 互联网摘选 2025-01-19 23:57:17

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