The results indicate that the transmittance of thin films reaches the maximum, 95.33%, when the cubic content ratio of oxygen to argon is 2:1. Anneal is in favor of the crystallization of AZO films.

  • 结果表明:氧气和氩气的体积流量比为2∶1时,薄膜透光率最高(95.33%);退火有利于薄膜结晶;

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