The results indicate that the collected current density is increasing with the magnetic field current. It is reach to 5.77 mA/ cm 2 at bias voltage being 150 V, the discharge gas being Ar, pressure being 0.2 Pa and target current being 3 A.

  • 结果表明,探针的收集电流密度随磁镜场的激励电流增加显著增大,在偏压150V、工作气体Ar、压力0.2Pa和磁控溅射靶工作电流3A时,收集的电流密度可以达到5.77mA/cm2。

  • 互联网摘选 2025-01-20 11:49:17

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