In the multistation exhaust system a mechanic pump is used as the backing pump and molecular pump as the main integral part to form a high vacuum system.

  • 由机械泵为前级泵,分子泵为主抽泵构成高真空系统,对高压开关管进行真空排气;

  • 互联网摘选 2025-01-20 11:49:44

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