When the ion bombardment energy was increased from 400 eV to 800 eV, the film structure was changed remarkably and its fracture toughness and hardness were improved further.

  • 离子辅助轰击能量从400eV增加到800eV时薄膜的结构发生了显著变化,断裂韧度和硬度均大幅度提高。

  • 互联网摘选 2025-01-20 11:57:47

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