TSV ( Through Silicon Via) is a new interconnected technology that used in high density 3-dimensional packaging.
硅通孔(Through Silicon Via,TSV)技术是一种应用于高密度三维封装中的新兴互连技术。
Among them, TSV is a very key process.
TSV的形成是其中很关键的一个工序。
Considered factors of the cost, precision control and so on, dry process is generally used to fabricate TSV.
考虑到成本,精度控制等因素,一般倾向于使用干法刻蚀来制作TSV。
TSV technology mostly used the ICP-RIE process, and using MEMS technics in future main packaging would speed up MEMS industry.
TSV技术主要采用ICP-RIE工艺,将MEMS技术应用于未来的主流封装技术将会进一步加快MEMS产业的速度。
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