DUV

The experiments on DUV coating deposited by ALD are carried out.

对ALD制备深紫外薄膜进行了研究。

Application of DUV deep lithography in LIGA process

深紫外深度光刻蚀在LIGA工艺中的应用

Real-Time Exposure Dose Control Algorithm for DUV Excimer Lasers

深紫外准分子激光实时曝光剂量控制算法研究

A real-time exposure dose control algorithm for DUV excimer lasers in a step and scan projection lithography is presented.

提出了一种面向步进扫描投影光刻机的深紫外准分子激光实时曝光剂量控制算法。

The design of a new kind of UV or DUV lithography lenses is described in this paper.

设计了一种新的紫外或深紫外光刻物镜。

Optical constants of fluoride films in the DUV range

氟化物材料在深紫外波段的光学常数

Compared with other UV or DUV lithography lenses, this lens can meet the needs of higher numerical aperture and full use of its field.

该物镜与国内外现有的紫外或深紫外光刻物镜相比，既能满足大数值孔径的需要，又能充分利用物镜的视场。