Compared with other UV or DUV lithography lenses, this lens can meet the needs of higher numerical aperture and full use of its field.

  • 该物镜与国内外现有的紫外或深紫外光刻物镜相比,既能满足大数值孔径的需要,又能充分利用物镜的视场。

  • 互联网摘选 2025-02-23 18:33:03

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