Lithography technique has been the key point to push forward the USL fabricator. X-ray lithography ( XRL) is one of the next generation lithography techniques ( NGL), which has the probability of industrialization.

  • 光刻技术是推动集成电路制造业不断向前发展的关键技术,X射线光刻技术是下一代光刻技术的一种,具有产业化的应用前景。

  • 互联网摘选 2025-01-20 17:33:24

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