In this paper, JGP 600 a new device of the magnetron sputtering deposition is introduced. The three magnetron sputtering target qualified to RF and DC is used;

  • 本文介绍了一种新的JGP-600型磁控溅射沉积薄膜装置。

  • 互联网摘选 2025-01-20 17:46:52

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