The films were characterized with Fourier transform infrared spectroscopy ( FTIR). The results show that c-BN films with cubic phase content being 85% were grown at a bias of 180 V in the first step lasting for 5 minutes.

  • 傅立叶变换红外吸收光谱的结果表明:当第一步偏压为180V,时间为5min时,得到了立方相含量为85%的c-BN薄膜。

  • 互联网摘选 2025-01-20 11:45:34

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