The outlet pressure of all those pumps were not lower than 0.1 Torr, and it follows that those pumps can run well by using directly the mechanical vacuum pumps as backing pumps without booster pump used.

  • 所有这些泵的最大出口压力不低于0.1Torr,因此前级泵可直接用机械真空泵,不必用增压泵即能正常工作。

  • 互联网 2025-01-20 11:49:44

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