Cr-Cu-N films were deposited using low energy ion beam assisted magnetron sputtering ( IBAMS). The effects of copper and bombardment energy on structure, hardness and fracture toughness of the films were studied.

  • 应用低能离子束辅助磁控溅射(IBAMS)沉积铬-铜-氮薄膜,研究了铜含量和轰击能量对薄膜结构、硬度和断裂韧度的影响。

  • 互联网摘选 2025-01-20 11:57:47

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