Harmonic suppression, non periodic and non closing in straightness profile error that bring about harmonic component distortion in slide error motion measurement are analyzed in detail.

  • 分析了经典频域三点法测量直行部件运动误差时所存在的谐波抑制,直线度误差的非周期性、非封闭性以及端点不连续而引起的高阶谐波分量失真等方法误差。

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