zmr

Results show that the grain size of polycrystalline silicon thin films increased to several centimeters long and millimeters width after ZMR.

研究结果表明：ZMR对籽晶层的区融、结晶效果比较理想，晶粒尺寸增大到厘米级长、毫米级宽；

The structure and electrical properties of silicon film after ZMR are studied.

对区熔后的硅膜结构和电学性质进行了研究。

The different O. Different ZMR processes are studied.

研究了不同的区熔工艺，对比了其区熔后的表面形貌。

ZMR ( zone melting recrystallization ) apparatus is introduced , and the processing characteristic of ZMR is studied.

研究了区熔再结晶 ( ZMR ) 设备及其工艺特点.

Detection of Molten Zone During SOI-ZMR Process

绝缘层上硅膜-红外区熔再结晶过程中熔区的检测

The ZMR ( Zone Melting Recrystallization) technique was next introduced to improve the smoothness and crystal quality of SSP and to further improve the quality of the thin film.

为了改善硅带衬底的质量，引入区熔再结晶的方法，期望将其表面平整度及结晶质量进一步提高，进而改善以其为衬底的多晶硅薄膜质量。

By means of zone melting recrystallization ( ZMR) method, polycrystalline silicon thin films with large grains and relative high carrier mobility were obtained, which could act as a seeding layer.

提出了一种简化的区熔再结晶方法，利用这种方法在非硅衬底获得了晶粒尺寸达到毫米级、致密的籽晶层。

ZMR ( zone melting recrystallization) apparatus is introduced, and the processing characteristic of ZMR is studied.

研究了区熔再结晶（ZMR）设备及其工艺特点。