The synthesis, structure, properties and process interaction of low k dielectrics are reviewed. Characterization techniques for low k dielectric films are summarized.

  • 综述了低介电常数介质薄膜的制备方法、结构与性能表征、工艺兼容性等领域的最新进展。

  • 互联网摘选 2025-02-21 15:31:46

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