The paper gives a detailed account of various kinds factors which affect on NTD silicon doping precision on the basis of a great amount of experiments and measurements. It also gives some quantitative and qualitative results.

  • 本文在大量实验测量的基础上,对影响NTD硅掺杂精度的因素作了较为详细的研究,给出了一些定量和定性的结果。

  • 互联网摘选 2025-01-20 12:32:27

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