On the basis of the exploration of the wet etching technology in micro-machining ceramic materials, the excimer laser micro-machining technique is determined, by which batches of ceramic hotplates with different structural parameters are produced successfully.

  • 在对湿法腐蚀微加工陶瓷材料工艺方法探索的基础上,确定了准分子激光微加工的技术路线,用该方法制作了不同结构参数的陶瓷微热板器件。

  • 互联网摘选 2025-01-20 12:54:36

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