A novel technique has been successfully developed to calibrate the ultra high vacuum ( UHV) and extra high vacuum ( XHV), which consists of XHV/ UHV chambers, a flow separation and a gas supply.

  • 超高/极高真空校准装置由极高真空(XHV)系统、超高真空(UHV)系统、流量分流系统和供气系统四部分组成。

  • 互联网摘选 2025-01-20 17:33:13

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