SOI with stacked buried layers formed by sequential nitrogen and oxygen ion implantation with multiple energy To deal with this problem, we put a new SOIM structure forward as a candidate.

  • 为了解决SOI材料的抗辐照总剂量问题,我们提出使用氮氧共注入形成的多埋层SOIM新结构。

  • 互联网摘选 2025-01-20 12:18:01

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