In this work, the temperature distribution in a 2 x 2 micro hotplate array was measured using infrared thermography. The temperature distribution of the small area and other thermal characteristics were obtained, providing reliable experimental information for the design of the micro hotplate array.

  • 本文针对研制中的气体传感器的2X2的微热板阵列,用红外热成像技术进行了测试和分析,获得其微小区域的温度分布和一些工作特性,为微传感器的研制和改进提供了实验依据。

  • 互联网摘选 2025-01-20 12:54:36

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