The concentration control of silicon doping in VB-GaAs monocrystal growth process was discussed. The modification to the factor of doping silicon into GaAs bulk was proposed.

  • 结合VB-GaAs晶体生长工艺,对工艺中掺Si浓度的控制进行了探讨,提出了掺杂计算的修正因子。

  • 互联网摘选 2025-01-20 12:32:28

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